Angle Valve Series
Angle Valve Series
Our vacuum angle valves are specifically designed for use in semiconductor vacuum systems, offering excellent sealing performance, low particle generation, and high durability. Made from high-grade stainless steel, they are ideal for critical processes such as CVD, PVD, and etching.
Available in both manual and pneumatic types, our valves support ISO-KF and ISO-F flanges, ensuring compatibility with standard vacuum equipment. All valves are tested under vacuum conditions to guarantee stable operation and long service life in cleanroom environments.
With precision design and superior material selection, our angle valves are a reliable choice for maintaining purity and performance in advanced semiconductor manufacturing.
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